Quanta 600F scanning electron microscope
Model: FEIThe Quanta 600F scanning electron microscope (SEM) is a versatile, high-performance instrument with three modes (high vacuum, low vacuum, and environmental) to accommodate the widest range of samples of any SEM system. The SEM system is equipped with an energy dispersive spectrometer and electron backscatter detector. In addition, the field emission gun (FEG) system contains a S/TEM detector for bright-field and dark-field sample imaging. The motorized stage has 150 mm of travel in the X and Y directions and 60 mm of travel in the Z direction. The SEM is also equipped with a Nabity lithography system to fabricate nanostructures down to sub 50 nm.
Features: The Quanta 600F scanning electron microscope (SEM) is a versatile, high-performance instrument with three modes (high vacuum, low vacuum, and environmental) to accommodate the widest range of samples of any SEM system. The SEM system is equipped with an energy dispersive spectrometer and electron backscatter detector. In addition, the field emission gun (FEG) system contains a S/TEM detector for bright-field and dark-field sample imaging. The motorized stage has 150 mm of travel in the X and Y directions and 60 mm of travel in the Z direction. The SEM is also equipped with a Nabity lithography system to fabricate nanostructures down to sub 50 nm.JC Nabity Lithography Systems Nanometer Pattern Generation SystemThe nanometer pattern generation system (NPGS) provides a user-friendly environment for the delineation of complex structures using a commercial electron microscope, e.g., FEI Quanta 600F. The SEM combined with NPGS is a powerful lithography tool for basic research and R&D.;
Contact:
- Unit: Nanoscale Characterization Facility
- Campus: Bloomington
- Resource Type: Equipment
- Contact Name: Lyudmila Bronstein
- Contact Email: lybronst@indiana.edu
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